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深反应离子刻蚀(DRIE,Deep Reactive Ion Etching)
Bosch Principle
Bosch工艺中的化学反应
🗒️DTI intro-Bosch Process
2024-10-4
| 2025-9-12 - Author:garlan
- URL:https://www.garlan.top/article/process-01
- Copyright:All articles in this blog, except for special statements, adopt BY-NC-SA agreement. Please indicate the source!
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